The Reserch Of Process About Back-illuminated CCD Image Sonser

The theorem of CCD image sensor, manufacturing technology of CCD image sensor, status quo and development of Backside-illuminated CCD image sensor were first introduced, and then the work theory, process theory, device structure and application of Backside-illuminated CCD image sensor were summarized. the key point of design technology and manufacturing process of Backside-illuminated CCD were introduced, and device test results were obtained.Although the manufacture process of Backside-illuminated CCD image sensor is more complexly than the Front side-illuminated CCD image sensor, the performance is better than the Front side-illuminated CCD image sensor. the fabricating process of Backside-illuminated CCD image sensor were introduce as sequence based on Front side-illuminated CCD image sensor, and then back grinding technology and backside passivation technology were particular studied as follow.Backside thinning technology and backside passivation technology were simply reviewed.By optimizing the fabricating process of Backside-illuminated CCD image sensor,a Backside-illuminated CCD image sensor sample was obtained, and the test data show that the expect demand was achieved.