Analysis Of Control For Liquid Injection In The Non-Contact Sealing Device

Lithography is the core equipment of the manufacture of the very large scale integration and immersion lithography is a kind of technology which is based on the traditional dry lithography equipment transformation. The industry generally recognize immersion lithography as a new generation of lithography of the semiconductor feature sizes of the 45 nm node and the smaller, which has received great attention in the semiconductor industry. Immersion lithography can change the laser optical refractive media with filling a complete layer of immersion liquid gap flow field between the lens and silicon. In order to guarantee the stability optical performance of immersion liquid and the steady formation of the gap flow field, it requires immersion liquid with high purity and can be updated in time. Otherwise it will lead to exposure defects and then influent the coefficient of lithography. Current immersion lithography use ultrapure water as an ideal immersion liquid. The immersion liquid injection control system can control the dynamics performance of ultrapure water, ensure it can meet the requirement of the steady formation of the gap flow field and not pollute ultrapure water at the same. The control effect of the rate of flow in the immersion liquid injection control system will has a significant influence on the steady formation of the gap flow field.This paper design the immersion liquid injection control system which used in the immersion lithography and especially focus on the design of the unit about the control of the rate of flow of the ultrapure water. The main works of this paper is shown below.1. This paper analyzes the demand of the immersion liquid injection control system, and design a prototype of the immersion liquid injection control system, including schematic design, component selection, electrical design, control cabinet processing design, control system structures design, etc.2. An experiment about system test with the use of the use of immersion liquid injection control system, ultrapure water preparation system and non-contact sealing device has been done. With the experiment result, we quantitate the index of the design of immersion liquid injection control system and define how the index affects the result.3. With the analysis of the flow control unit in the immersion liquid injection control system, we define the effect of time delay in the flow control. At the same time, some research work about how to eliminate the effect of time delay in flow control has been done with simulation and theoretical analysis. Based on the analysis data we designed a fuzzy variable gain Smith predictor to solve the effect of time delay in the flow control unit.4. This paper used computer language to realize the controller in the immersion liquid injection control system and used it to conducted four experiments. With the experiment’s data we can verify the validity of the simulation and prove the advantages of our controller. We also used immersion liquid injection control system with this controller to do some experiment with the help of ultrapure water preparation system and non-contact sealing device.