| Master Control System, short for MCS, which aimed at coming into being steady flow and realizing immersion lithography technology, is an upper computer system of three immersion liquid control systems in immersion lithography machine. These immersion liquid control systems differ from independent function and operate with complicated process. The coupling is low because of controllable variance. And that requirement of the integration and modularization is higher and higher for control system of immersion lithography machine. In order to reduce complexity and design effective control sequence, it is practical significance to use appropriate modeling method to design MCS.In order to solve two particular problems in design of MCS, this article puts forward finite state machine to simplify systematic design. Orthogonal method is adopted to analyze system state. Stateflow software is applied to test rationality of the status transfer mechanism. Finally, the operating platform is created to prove the effectiveness in design of MCS. The following has been accomplished:1. Introduced background of project; Analyzed the two particular problems during design of MCS; Came up with finite state machine to simplify systematic design; Raised the whole plan to design MCS and function and requirements were explained in detail.2. Proposed hardware plan to design MCS; Participated in analysis of hardware and hardware platform was set up for MCS.3. Designed software architecture of MCS; Analyzed the system status with orthogonal method; Understood the control sequence by analysis of control flow chart; Employed use case diagram and sequence diagram of UML to comprehend systemic interaction; Put to use finite state machine to status transfer mechanism; Additionally, testified the systemic effectiveness by Stateflow software.4. Integrated the software platform with the hardware platform and tested the systemic function; Completed to the performance test of the main modules created with finite state machine. |
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