Design On Roll-to-roll Chemical Mechanical Polishing Machine Of Ultra-thin Flexible Substrate

As the research object of this article, 304 stainless steel is commonly used in the flexible display substrate material, and the flexible display is becoming the most application prospect of the next generation display technique,which is the development trend of displays in the future.So in the foreseeable future, the strong demand for the flexible display substrate of market prompt such results which 304 stainless steel occupies half the market of flexible substrate materials. That stainless steel belt is processed into flexible substrate is the technical problems Which stainless steel material surface roughness is higher, and especially the large size thin flexible steel band make its processing difficulty more serious. Currently, Ultra-precision machining technology with global flat ability also only chemical mechanical polishing(CMP).Chemical mechanical polishing technology, which is one of the common ultra-precision machining method, is mainly used for processing super smooth surface without damage of metal materials, hard brittle materials, or other materials. At the same time, the chemical mechanical polishing technology is acknowledged as the best technological process which can achieve the local and global planarization and low roughness of work piece surface.At present, as a realization carrier the of chemical mechanical polishing technology, traditional chemical mechanical polishing machine still is the processing mode of a single batch. With the development of science and technology, many new things as mushroomed is the growing emergence. Among them, a scheme is put forward that the flexible substrate material of the flexible display choose Roll-to-Roll ultra-precision machining technology, which then puts forward new requirements for ultra precision machining equipment. But there are not the related research work in the aspects of chemical mechanical polishing processing technology of flexible stainless steel belt, especially the research content of flexible steel strip Roll-to-Roll polishing processing. For the new polishing processing mode, there is not such the equipment at home and abroad which is used to the Roll-to-Roll continuous chemical mechanical polishing processing model of the flexible substrate.So the purpose of the paper is that equipment for Roll-to-Roll continuous efficient flat chemical mechanical is developed.This article chose the 600 mm wide, 0.05 mm thickness roll 304 stainless steel flexible sheet as the design basis. At first, lots of works is performed which contain the movement mechanism analysis of the different polishing machining parts and polishing machine plan of each function module. Then, According to the process parameters research and analysis of existing polishing machine and the experimental data validation of 304 stainless steel CMP processing, the design basis of the overall scheme of the equipment is drawn up. Finally, according to the kinematics relation of the Roll-to-Roll continuous flat system, the research results of material removal mechanism, the traditional chemical mechanical polishing machine structure, the motion relationship between the work piece and the polishing pad and the related process parameters control mode, Roll-to-Roll chemical mechanical polishing wafer test rig is developed. By the work foundation, at the beginning, lots of development work of Roll-to-Roll chemical mechanical polishing wafer test rig are launched which is the structure design of main components and the check work. and then the design work of the auxiliary function parts structure of polishing machine equipment is carries on, and according to the parts assembly condition of each functional module, the polishing machine overall frame structure is designed. Finally, the polishing machine control system design work is carried on.