Enhancement And Optimization Of Hotspot Detection System Based On String Match

Because of the limit of semiconductor manufacturing technique, more and more problematic configuration occurs in the layout. Certain layout configuration is likely to reduce yield and reliability. Such problematic configurations are called layout hotspots. In order to increase yield and reliability, the layout hotspots need to be detected efficiently and accurately and corrected then. This paper introduces a string pattern match based hotspot detection algorithm and the enhancements and optimizations.The concept of range pattern is introduced to represent hotspots. In addition, the concept of layout matrix, cutting-slice, slice, and fragment are also introduced. Then the flow of hierarchy hotspot detection algorithm and multi-pattern matching are also explained. In addition, this paper also talked about the enhancement such as sliding match mechanism, boundary check mechanism, hotspot rectangle identifying mechanism and the optimizations such as layout pre-processing, bitmap optimization and 2X grid mechanism.