Research On Image Distortion Correction And Evaluation Method Of SPM

With the development of Scanning Probe Microscope(SPM), human beings have stepped into a completely new area at the nano scale. After decades of research and efforts, this new area becomes a special research field, which is called as nano science and technology or nanotechnology. Nanotechnology is the research of the feature and application of materials in size range from 0.1 nm to 100 nm. At the same time of conducting application research, a lot of research work still focus on the elimination of the nonlinear properties of piezoelectric, which is the nano drive of SPM. In this paper, we first establish a Rapid Control Prototype (RCP) SPM platform. Then, a scanning method is proposed to alleviate the distortion within a large scale scanned image with high resolution. Finally, a method to estimate the distortion within a scanned image is carried out.Firstly, a SPM platform is established by connecting the components of SPM, which is CSPM5500 from Benyuan company, with a single board dSPACE DS1103. This platform forms a RCP control system which can easily compile the scanning algorithm and monitor the system state online. Secondly, a scanning method is proposed to alleviate the distortion within a large scale scanned image with high resolution. This method divides the designed scanning area into blocks. After the blocks are scanned, a phase correlation method is employed to calculate the drift between them. And finally a large scale image with high resolution can be obtained by stitching these blocks together. Thirdly, a method to estimate the distortion within a scanned image is presented. This method scans an one-dimension grating image, then adjusts the image scale and filters the image, and finally a proposed evaluate index can be calculated. This evaluate index can reasonably estimate the distortion within an one-dimension grating image and then estimate the effectiveness of a scanning algorithm.In conclusion, this paper studies three aspects. The first one is platform establish. The second one is a method to alleviate the distortion within a scanned image. And the third one is a method to estimate the distortion within a scanned image. The experiment results shows that the platform is well built and the proposed methods both have good results. All these research results offers a well foundation for later scholars.