Design Of High Sensitivity Horizontal Hall Sensor

Hall sensor is a magnetic field sensor based on the Hall Effect. Hall Effect is obtained one kind of Magneto electric effect. The hall effect of the semiconductor is much stronger than the one of the metal. So hall sensor based on the semiconductor material are widely used in industrial automation technology, detection technology and information processing for its advantage in the aspects such as structure, size, weight, life, power and range of application range compared with other sensors,.This paper introduces a horizontal hall sensor applied to 0.35um BCD process technology. The paper begins the introduction of hall sensor with the principle formula, process technology and performance parameter. Then the device-level and circuit-level module of hall plate that is the core of hall sensor is built and verified.With the considerasion of application condition, the detailed signal processing circuit is determined after comparsion of the verification result. Moreover, the layout is drawn based on the process technology. Six different groups of hall chip is made with different geometrical parameters and doping concentration. At last, the performance characterization is tan out.The innovation points in the design are as the following. The first is new accurate circuit module of hall plate. The second is new geometrical parameters and doping concentration are set based on BCD process technology. The third is an improvement in layout design for better isolation performance. The result from the precise experiment of the hall cell verifies the optimization method can realize highest hall sensitivity of 964V/A·T, the minimum offset voltage of 0.05mv and temperature coefficient of 0.5%/K. The result turns out that the optimization in the design has realized the design target.