Electric Field Simulation And Experimental Research On Nanometer Time Grating Displacement Sensor

Nanometer displacement sensor is the guarantee of "macro structure nanometerprecision manufacturing" of core features module in the nanometer CNC machine,thespecial needs of the defense industry and large-scale ASIC filed.Large range and highaccuracy is not taking into account at the same time, that is the most contradictory innanometer displacement measurement methods currently. A new nanometer time-gratingsensor based on the theory of the transformation of time and space is put forward.Sensorconverts space into time to high-precision measurement by alternating electric fieldconstructed by differential capacitance. It’s easy to realize large range by taking advantageof the high-precision measurement of time to improve measurement precision.In order to achieve the most optimal design of sensor by combing theory research,model simulation and experimental research repeatedly in the paper.The invisibility of theelectric field has brought problems in preliminary studies. In the process of researchingnanometer time-grating sensors, unnecessary work is avoidable by having sufficientknowledge of the electric field, grasping the law of electric field, understanding the electricfield distribution of the measurement model.The following work has been done in this paper:1.the thorough analysis andderivation is carried on measuring principle of time-grating sensor;2.According to thecharacteristics of sensor measurement model, simulation model is established. The finiteelement simulation of the distribution of the electric field for sensor in differentparameters,incentive, multi-media using ANSYS software.The once,fourth harmonic errorcauses of sensor is found through simulation analysis,also the relationship between theelectric field distribution and sensor error characteristics is obtained.The experimentalstudy of simulation analysis and sensor stability is carried on by building experimentalplatform.The sensor has been optimized according to the simulation analysis andexperimental verification of once, fourth harmonic error.Through optimization,theprecision of sensor achieves±300nm when measuring range is200mm.Based onnanometer time-grating sensor research, more in-depth understanding of the sensorcharacteristics, further improving the system of nanometer time-grating sensor theory isachieved. Laid a solid foundation for further research and provides the theory-practice ofscientific research methods.