| Optically-induced dielectrophoresis (ODEP) is a new kind of particlemanipulation technology，compared with traditional dielectrophoresis manipulation,the most obvious feature of the optoelectronic tweezers is the virtual electrode; can beflexible controlled by graphics software. Through software, optical pattern can formon anywhere of the photoconductive layer, so as to achieve flexible control. Themanipulation of no contact, no damage to particles by ODEP, has a wide applicationprospect in the biological sciences, medicine, and pharmacology field,This paper first introduces the theory of different types of micro nanomanipulation methods and the advantages and disadvantages, then introduces theresearch progress of ODEP and its application in micro and nano manipulation, alsoanalysis its theory, deduces the operate mechanism of dielectrophoresis. The theory issimulated by COMSOL Multiphysics and MATLAB software. At the same time, thispaper describes the structure, properties and preparation method of amorphous siliconthin film(photoconductive layer), provides a theoretical basis of reasonable parameterselection for later deposition experiment. Finally this paper researches thedielectrophoretic manipulation of cell, introduces the dielectric model and commonlydielectric analysis method of cell.In the experimental part, this paper first completes the deposition experiment ofthe photoconductive layer, set the appropriate parameters according to the actualsituation, then get the most appropriate parameter by the test results of deposition.Finally, designs the virtual electrode by exciting the photoelectric effect ofphotoconductive film. At the same time, high frequency AC voltage is applied;polystyrene microspheres with diameter of4μm and10μm can be manipulated.Microspheres move under the action of negative dielectrophoresis force at the speedof8.8μm/s and35μm/s, respectively. Non-contact, non-destructive manipulation of ODEP to microspheres has been achieved. |
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