Research On LRC Micro-nano Robotic Arm By Oscillating

With development of micro-nanofabrication technology,MEMS become more complex and tinier,and their assembly requirements and assembly difficulties have also increased,which has increasingly demonstrated the importance of micro-operating system research.This paper proposes a micro-nano mechanical arm based on the principle of LRC oscillate circuit.The mechanical arm uses the principle of electrostatic levitation to generate the electric field force acting on the micro device,and uses the LRC oscillate circuit to feedback control the electric field force to realize the picking,moving and placing operations of the micro device.By establishing electromechanical coupled mechanical model of micro-nano mechanical arm,the working principle to realize micro-nano operation of the mechanical arm is analyzed.The force on the workpiece is studied when the micro-nano mechanical arm performs micro-operations of picking,moving and placing.The simulation analysis of the electric field changes during the working process of the micro-nano mechanical arm is done,the capacitance value and the electric field force change curve is decrmined.A micro-nano operating system based on the LRC oscillating micro-nano manipulator is produced.The micro-nano operating system is composed of an image feedback system,a motion positioning system,and a power circuit module.According to the requirements of the micro-nano operating system,the manufacturing process of the end effector is studied,and the micro tool electrode and the nano tool electrode are prepared by the electrochemical corrosion method.The micro-nano operating system is used for micro-particle manipulation experiments.Through experiments,the optimization and adjustment of system parameters are completed.The picking,moving and placing operations of micron-scale silicon nitride particles have been completed,which proves the feasibility of micron-scale operation of micron-scale components.The micro-nano operating system is used for nano-particle manipulation experiments.Through experiments,the optimization and adjustment of system parameters are completed.The picking,moving and placing operations of the helical carbon nanotube and monodisperse polystyrene nanospheres are completed,which proves the feasibility of micro-nano operating system to operate nano-scale components.