MEMS Structure And Principle Of Digital Geophone Research

MEMS is a Micro-Machined company Mechanical Sensor is short for microcomputerelectromechanical sensors，Micro-electro-mechanical system (MEMS) sensor technology, hasbeen gradually used in the field of geophysical prospecting. Using MEMS technologydevelopment of a new generation of digital seismic acceleration sensor, the output from thedc to kilohertz range (e.g.,1KHZ), take on the characteristics of the acceleration detector,and has very low inherent noise and distortion, direct digital output, high fidelity of the vectorand the response of low frequency. When the size reduced to a certain range, many physicalphenomena will be of great difference with the macroscopic world, some general theory willbe corrected. At present, the research of MEMS is still mainly rely on experience and testrepeatedly, the complete theoretical system of micro scale has not yet been established, whichhas seriously hindered the further development of MEMS technology.This thesis mainly from the analysis of the MEMS digital detector status quo at homeand abroad, mainly system to study the structure and principle of MEMS sensor, theperformance of MEMS digital geophone and compare the performance of the traditionalgeophone, get the advantage, thus illustrates the MEMS value and significance of digitalgeophone development and application, in the final analysis the technical index of the MEMSgeophone. Nowadays, there is no international earthquake dedicated MEMS geophoneunified specification, each manufacturer production of MEMS geophone technical indicatorsof the project and the test method is not the same, this paper illustrates the MEMS techniqueindex of digital geophone, have certain innovation. The purpose of this paper is tocomprehensively study of MEMS digital detector, to make all of its structure and principle ofa more in-depth and meticulous understanding of, at the same time analyze the futureprospects for development, helping MEMS digital detector in the production and applicationof science, has practical significance.