| This paper discusses the single active pressure sensitive components whichrealizes measurement range0~1MPa, the high overload of10000g and widetemperature that ranges from-40℃to100℃, precision measuring, compositepressure sensor with Simulation linear output, TTL level output, digital output anddata communication function.Using mechanical pressure sensor which consists of corrugated pipe and microswitch to activate the active pressure sensor by delaying time in order to avoid thecontent rational damage to the powered up active pressure sensor and activeelectronic components that caused by the high overload.By the comparison of the substrate material of pressure sensitive componentssuch as the Monocrystalline silicon, polycrystalline silicon, SOI, and the material ofsapphire, we confirmed that SOI material is easily processed,moreover the zerodrift and temperature drift are both small when the sensors ranges in the widetemperature. Finite element software are used to analyse surface stress distributionof the sensitive components of different shape such as C, E type, double island type,among them the double island type sensitive components was analysed selectively.Combined with the characteristics of SOI materials the resistance graphics wasetched using Plasma dry method, and the Silicon cup was made by adopting theTMAH anisotropic corrosion technology.The constant current source supplies power to the sensitive component, and themodulation circuit makes the signal into standard signal. The standard signal wassend to the Micro processing by AD, after data fusion processing, DAtransformation and interface chip conversion, the signal is output in forms of twoways0.5V~4.5V(corresponding to two measurement range), five road TTL level,and RS232serial port. After the calibration by standard instrument, the syntheticaccuracy of the sensor reached0.1%FS, the threshold and output signal of thesensor can be set by the PC software, and the data communication is stable withouterror, crash... |
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