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Preparation Of The Thermocouple Sensor With Micron Scale Film Thickness

Posted on:2015-05-31Degree:MasterType:Thesis
Country:ChinaCandidate:Y C M WuFull Text:PDF
GTID:2298330431989254Subject:Instrumentation engineering
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Recently, with the changing of the temperature measurement requirements,the measurement range, accuracy, response speed and installation methods ofthermoelectric sensor are put forward higher requirements. Thin film thermocouplebecomes an important research direction in the field of the micro and small scale heattransfer tests. At present, materials of the sensor are single and the sensor’s workingtemperature is low, it’s difficult to be applied in higher temperature. The thin filmpreparation technology is immature, low efficiency, high cost and difficult totransition. All these problems become obstacles for the thin film sensor inminiaturization, integration and precision.The topic takes the temperature range, accuracy, consistency, repeatability andresponse speed as indicators, and works out the preparation of the thin film sensor,by researching some key issues, such as the mechanism of thermoelectric conversion,thermocouple’s structure, electrode materials and evaluation methods of theperformance, which applies for the requirements of fast response, accuracy, simple,safe, efficient preparation process and others. Main research contents are following:1. Analyze the working mechanism of the temperature sensor, determine thematerials of the sensor, such as the electrodes, the compensating lead wire and so on;Analyze characteristics of thermocouple with the different structure, design thestructure, layout and mask of the sensor.2. Analyze the advantages and disadvantages of existing technology. Propose athin-film processing technique which based on the printed electronics. Complete thepreparation of thin-film sensor.3. By the comparison method, test the sensor’s static characteristics and otherindicators. Use the laser pulse for the dynamic characteristic calibration and evaluatethe response time. Experimental results show that the method can manufacture thin-film sensorsafely, efficiently, fast and in batches. The Au-Pt thin-film thermocouple sensor has awide temperature range, its maximum error is about0.88%, and the repeatability canbe achieved99.51%, which complying with the requirements of test procedure. It hasa good dynamic response, the response time can be achieved1.64ms.
Keywords/Search Tags:Thin film sensor, Laser pulse, Au-Pt thermocouple, Time constant
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