Technology Research Of Thin Film Temperature Sensor With Fast Response

Cause by intense friction with the air, material surface temperatures of aircraft flying in the atmosphere could become much highly. For some aircraft instances, the material surface temperatures of aircraft could high up to 1200℃. In order to ensure the safe and reliable aircraft flying,to select the appropriate material and thermal measures were needed. Besides, to measure and analyze thermal energy of each point of aircraft under different Mach number and angles are also needed for calculating mechanical properties of materials accurately. The research of the thin film temperature sensor with fast response technology stems from the "863" project, studied on the film temperature sensors in the design, production and related properties.This paper systematically analyzed the rapid response film temperature sensor technology, designed and manufactured the related film temperature sensor. The paper mainly studied and worked as follows:1,Based on analyzing theory of the thin film temperature sensor with fast response technology by the numbers, the sensor chip and fabrication process of the sensor chip were designed.2,The adhesion force of the large AL2O3 films with high-density, good insulation properties characteristics was made by using the technology of sputtering ion fancies.3,Based on a large number of coating experiments, heat treatment process, related to performance and so on, the high-density, stable performance, high uniformity, the adhesion of big-film thermocouple had prepared by using of precision grinding processes, ion beam sputter coating technology and steel mask way.4,The sample was made successfully. Via the measurement, The result showed that measure temperature can reach 1200℃, the response time is about 50ms, and the accuracy is about 1%.5,Through the research of static and dynamic film thermocouples characteristics calibration methods, the film on the sample detector performance test was developed. Test results showed that the film temperature sensor fully meet the design requirements.