Design Of Real-time Hardware-in-loop Simulation System For Dual-stage

Semiconductor industry plays an increasingly prominent role in economic, theperformance of lithography affects the yield of the chip directly.In recent years,dualstage technology has been applied which makes the yield of chip improved sharply,thedevelopment process of dual stage requires masses of simulation.In traditional simula-tion methods,the process can’t be visualized,what’s more,It is not close to the actualsituation.In order to resolve these problems,the controller is introduced into the loop,anda visual3D model of the dual-stage is designed by the use of virtual reality technologyto replace the real stage,hoping that it could play an important role in design verification.Firstly,a visual3D model of the dual-stage is established, the original mechanisticmodel is complex and poor in read-time performance,we simplified the model byreducing the complexity of internal structure,then we decompose the model according toits motion law.The decomposed model is imported to the OpenInventor by establishingmasses of modes in order,the scene of the dual-stage model provides variety ofinteractive methods which is based on the message mechanism and built-in API ofOpenInventor.The collision detection of the model is achieved by a function which usesOBB,the collision accident can be judeged using the collision detection.The6-DOFmotion of the platform is decoupled according to the machinery installed relationship.Atlase the structure of the program is optimized to ensure its real-time performance.Secondly,in order to use the simlution system easily,a upper machine software isdesgned which has a humanized interface.We achieved three base features after ademand analysis is performed.Other features such as user management,parameterset,records storage and curve drawing are based on these base features,the software isoverall developed using the MFC framework and Object-Oriented method.Finally,VxWorks RTOS is used to ensure the real-time performance.As a bridgeconnecting the PC and controller,we optimized its network communication module,thenthe VME module is configured. Due to the controlled object need to be implemented inthe C6414DSP, a mass of code needs to be wrote to design the controllers.We use RTWto generate highly optimized code,the code is successfully transplanted to the DSP.The simulation system is born to be visualized,real-time and easy to use,so a uppermachine software and visual model is designed to achieve this.Otherwise,the links ofthe system is optimized by using asynchronous sockets and Z-Buf sockets,and multi-thread technology is widely used,through simulation testing,the visual simulationsystem can meet the demands of project needs.