Design And Analysis Of 2D OF Micro-Positioning Stage Used Corrugated Flexure Units

Precision positioning technology is one of the key technologies on precision manufacturing, precision measuring and precision actuating. As the speedup of micrometer and nanometer science and technology, requirement of precision positioning technology applied to different domain is improving. Micro-positioning stage with large moving range, high accuracy and reliability is in great demand. In this paper, a 2DOF micro-positioning stage based on corrugated flexible units(CF units) is designed and studied.To overcome those shortcomings of common compliant joints, periodically corrugated flexible unit is applied to design compliant joints. Basic corrugated beam unit is modeled by using pseudo-rigid-body method. Then, the trajectory and deformation behavior of CF unit are estimated by the transformation of coordinate and superposition of the deformation of corrugated beam units. Empirical equations of CF unit stiffness components, except of the torsional stiffness, are obtained by curve-fitting method. Data used in fitting is obtained by finite element analysis(FEA). At last, CF unit is used to design translational and rotational flexible joints, which verifies the validity of the empirical equations.A novel 2DOF micro-positioning stage which is actuated by noncontact force provided by electromagnetic actuators is designed. Then the static and modal analysis of the stage are conducted by FEA via Workbench. Diving technology is worked out after comparison with various diving schemes, and the complete positioning system is built up. After the design of the proposed positioning system, experiment of static characteristic of the stage is carried out and kinetic characteristic is studied. In order to improve the positioning accuracy, continuous control signal is applied to eliminate the residual vibration, though it need longer time than transient motion, and displacement compensation strategy is used to reduce the negative effect caused by hysteresis loop. Experiments are set up to validate the competence of the design and analysis. The results verifies the validity of the given control technology. Lastly, static and kinetic characteristics of the stages which are respectively designed by notch joints, leaf springs and CF units are carried out.