Design And Experimental Study Of A Micro-positioning Stage

Precision positioning is the key technology of precision machining, precision measurement and precision engineering. Micro-positioning stage is important carrier used in the Precision positioning technology. A two-degree-of-freedom (2-DOF) micro-positioning stage driven by piezoelectric actuator(PZT) is developed experimentally and theoretically. This dissertation systematically analyzes the key technology, pseudo-rigid-body modeling technology, hysteresis technology of piezoelectric actuator, and experimental test. The main achievements are summarized as follows:A kind of micro-positioning stage driven by piezoelectric actuator, guided by compliant translational joints is designed. The pseudo-rigid-body model and decoupling characteristic of micro-positioning stage is developed by means of the finite element method and pseudo-rigid-body method.A new kind of compliant translational joints is designed. The static and dynamic characteristics of two kinds of compliant translational joints have been analyzed through the finite element method, and the characteristics are obtained.The two kinds of compliant translational joints and micro-positioning stage are modeled according to the pseudo-rigid-body model method. An example is also proved the accuracy of the method.Based on the theoretical research of the actuation mechanism,the hysteresis nonlinearity of the piezo-ceramic had been studied, and the characteristic of the piezoelectric actuators was tested. The Bouc-Wen model of piezoelectric actuator was built.The static and dynamic characteristics of the micro-positioning stage are also studied by experimental method. The results of theoretical analysis, finite element method and experimental tests prove that the theory and method applied in design are right and efficient.