| In this dissertation, the micro-positioning system actuated by piezo-ceramic has been studied. The main purpose of the research is to seek a means, which can realize three degrees high accuracy positioning using piezo actuator and flexure hinge structure.In chapter 1, the aims of the thesis are presented. First the significance and urgency of the research on micro-positioning system are expounded. Second, every component of the system are discussed and compared. Third, the present research situation on micro-stage at home and abroad is surveyed. Finally, the main content of the dissertation is addressed.In chapter 2, based on theoretical research of the actuation mechanism, the characteristic of the WTDS-IA actuator is tested. Then a linearization method is presented. Thirdly, the preisach model of hysteresis of piezo ceramic actuator is set up.In chapter 3, by compare the principle of some electrical source, a power supplier is designed, and the characteristic is been studied.In chapter 4, a three degrees micro stage is designed. First, the flexure hinge is theoretically and finite element investigated. Second, the structure of micro stage is discussed. On the basis of the former research, a micro stage is designed. Finally, the characteristic of the stage is studied by finite element and experiment.In chapter 5, using open-loop strategy and PID strategy design the controller respectively, then some experiments are done using the controller. The result showed that the open-loop controller and PID controller can reach ±0.17um and ±0.01um positioning accuracy respectively. By add former feedback in the PID controller the response time of step input reduced form 1.2s to 0.3s.In chapter 6, main achievements of the dissertation are summarized and the further research work, which will be done in the near future now on is put forward.
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