Study On The Nanofabrication Technique Via The Combination Of The AFM-based Nanoscratching And The High-precition Stage Moving

AFM tip-based nanoscratching has been one of the most effective approaches for fabricating nanostructures. Because of the development of nanotechnology, fabrication of complex nanostructures has been of active research among scholars all around the world. Through the experimental verification, the feasibility, low cost and effectiveness of these techniques are presented. In this paper, we investigated the problems of the consistency and complexity of fabricated structures.First, to obtain the consistent machining depth and quality, a novel direction-identical scratching method for machining nanostructures via a modified AFM probe-based machining system is proposed. The modified AFM system included an air-bearing spindle for guaranteeing the same direction in the fabrication process. Fabricated nanostructures include nano-line and nano-channel patterns. Therefore, we solved the problem of the consistency of structures in the fabrication process.Second, we changed the moving path and velocity of the AFM tip via extensively using the commercialized AFM system. Nanochannels consisting of complex structures(superposition of geometric figures) could be fabricated through controlling the scanning velocity of the AFM tip and combining the movement of the AFM tip with the high-precision stage.Finally, we fabricated three-dimensional structures(quasi-sine wave, triangular wave, etc.) through controlling the moving velocity of the AFM tip as well as matching the moving relationship with the high-precision stages. In this way, we can change the feed during the fabrication process. Therefore, by controlling the moving path and velocity as well as the movement of the high-precision stages, the problem of the complexity of fabricated structures is solved.