| Atomic force microscope( AFM) which is developed on the base of scanning tunneling microscope (STM) and overcame weakness of STM that it can't examine insulated material, is the most effective and important means of testing and processing in nanometer technology, is receiving increasing popularity in application with the rising of nanometer technology. Besides the stability of the instrument itself, the quality of the re-built pictures, the simplicity of its operation, the expansion of its application sphere and the trend of becoming an industry is being more and more concerned.This dissertation is based on the foundational principles of the AFM, modified-techniques related to different application and some new type instrument that sharing the same principles. By comparing and analyzing, having known about its shortages in the procedure of developing and applying, this dissertation presents the way to modify it to satisfy the need comes from new application design. IPC—208B type of atomic force microscope which is integral whole gathering AFM with STM and among them STM can use alone has been design. Some experiments were done to test the modification. More application experience is gained, its horizontal distinguish the dint the better than 0.1 nm, lengthways distinguishing dint 0.01 nm. This does not only expand its application sphere but also make it easy to get popularization and industrialization.This dissertation mainly concerns the basic theories of the AFM, and study the applicability of STM as the device to detect the micro-displace of the cantilever of the atomic force microscope after a way for tiny moving examination of wiry cantilever is studied. After discussing its brachial examination and got-up way, the wiry cantilever and its three dimensions control organization are developed. Piezoelectricity ceramics scanner and more drive control systems are designed. We also study function of our apparatus with applied research.
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