Design And Research Of Vertical Cavity Surface Emitting Semiconductor Laser’s Transparent Conduting Window

Vertical cavity surface emitting semiconductor lasers have attracted lots of attention of researchers because of the good beam quality, high photoelectric conversion efficiency and ease array integration. It has been widely used in optical communications, optical display, optical storage, laser printing, and other fields. In this paper, an ITO films is designed which as the transparent conductive window of surface emitting semiconductor laser in order to improve uneven injection current of the device, reduce the equivalent thermal resistance of the device, simplify the production process and improve the output power of the device. The ITO film which as the laser conductive window is prepared with electron beam coating mechanism depends on structure designing and analyzing. The optical and electrical characteristics of the thin film are tested and the comparative analysis of the effect to the current density distribution of the device is given with ITO electrode and annular metal electrode. Analysis showed that ITO film can improve the output power of the device to a certain extent when it as a transparent conductive window of vertical cavity surface emitting laser.