Research On The Fabrication Of Ultra-fine Flexible Transparent Conductive Circuit

With the development of the new round of flexible electronics technology,the line width of circuit increasing fine, which put forward higher requirements of the materials and application of printed electronics. The key is how to achieve smaller feature size of flexible electronic devices in larger format flexible substrate with lower cost. As device dimensions shrink further, asked for the order of the conductive network line width reach nanoscale. Therefore the characteristic size of conductive circuit submicron or even nanometer level is inevitable.In this thesis, with the combination of nanoimprint lithography and nano conductive material filling technology, we obtain ultra-fine nano-patterned flexible transparent conductive circuit. Firstly, we exploit the laser patterning equipment i Grapher to realize flexible transparent substrate. Meanwhile we use low-temperature plasma surface treatment to modify the surface properties of the UV substrate. Then with the technology of nano coating and paste scratch, nano material’s filling to the network grooves, which access to fine metal-mesh transparent conductive film. And filling characteristics of different aspect ratio network grooves were studied experimentally. Based on the filling technique, we propose a controllable filling technology with additional electric field. Experiments show that the electric field driving filling can significantly improve the direction selective, such that the randomly oriented network grooves obtain uniform filling, thereby reaching a high conductivity ultra-fine transparent conductive circuit.In this thesis, we describe the production process of ultrafine flexible transparent conductive film systematically, and propose a method of electric driving filling, providing a basic technical process for the further study of printed electronics technology.