Research On Controled Of Method2D Nanoscaled Displacement-Measuring System

The high-precision displacement measurement system is used to get position accuracy,not only the foundation of the machinery, instruments, tools, weapons, aerospace and other industries, but also restricting the industrial products and technology. With the development of technology, we have higher requirements about the displacement measurement, High accuracy, fast, high performance and stability is what we want. In this paper, some new methods is mentioned, such as feed-back and feed-forward algorithm and another advanced control algorithm neuron algorithm, these methods are mainly used to control the Z-axis direction for the probe cantilever to adapt the surface of the sample in Nano level, when we scanned a sample, the image data is extracted in order to analyzed by the peak detection method,this method can detect two dimensional raster every row and every column of peaks with valleys, and we can count the number of peaks with valleys, so that the probe in the XY plane can detect the actual movement distance of the raster.