Design And Fabrication Of589nm Laser Optical Path Integration System Filter Film

Yellow laser is widely used in military and civilian fields. For the sake of improving the signal to noise ratio and filtering the useless signal, Ta2Os and SiO2are chosen as the film materials. Electron gun and ion-assisted deposition system are used for film preparation. We deposit the interference filter film which has specific transmittance at589nm,1064nm,1178nm and1342nm. In the actual coating process, the refractive indexes of materials are not stable in different conditions, In addition, the monitoring method lead to the errors. Optimizing the parameters and designing the film system can effectively control of film thickness monitoring accuracy. Therefore, the optical properties of corresponding to the wavelengths are enhanced. The experimental results show that the filter film can withstand high temperature, wet and other environments, completely meet the demands of yellow laser.