Detection And Analysis Of Pattern Parameters In Laser Interference

Laser interference technology is a frontier research subject that incorporates laser and interference optics. It has the features such as the large filed of view, high resolution, simple setup and low cost. It has broad application prospects. The main factors affecting interference pattern results are analyzed based on the theory of laser interference including the pattern parameters of two-beam and three-beam laser interference and the incidence conditions of the beams.In two-beam laser interference, both symmetrical and asymmetrical incidence conditions are discussed based on the fringe patterns obtained. In the case of three-beam laser interference, both coplanar and non-coplanar incidence conditions are discussed. It is noted that interference patterns are modulated when three beams are coplanar. Laser interference pattern parameters and beam incidence conditions are examined by simulation and experimentation. The results will be useful for the design and alignment of laser interference systems to obtain the desired patterns, in particular for laser interference lithography applications.