Development 28.3LPM High Sensitivity Particle Counter Sensor

Optical particle counter(OPC) is designed to measure the size and number particles suspended in a clean environment.It plays a very important role in the clean room technology. Particle Counter domestic technology is relatively backward.With the development of industrial technology, the sensitivity of domestic commercial particle counter has gradually can not meet the requirements. The key of the development of domestic particle counter of higher sensitivity lies in the design of the particle counter sensor.In this paper, we start from the characteristics of the scattered light from the sub-micron particles,and analysis factors that affect the particle counter sensor sensitivity and resolution in terms of the optical system and sampling flow system. We design a high-sensitivity sensor. We use a high power laser diode as light source, which greatly improves the power density of the photosensitive region. The optical noise has been reduced effectively by the aperture and light trap.The whole-semiconductor OPC sensor has a small size and simplestructure.The OPC sensor is calibrated according to the national standard. This sesor can detect particles from0.15um to0.5um,and its sampling flow is28.3LPM.The resolution of this OPC sensor is over80%,in line with the national standard.