Development Of Valveless Micropump Actuated By Laser Shock Wave

Micropump has been deeply researched with the development of micro fluid system,which is the principal and power component of micro fluid system. Traditional micropumpdriving methods always have disadvantages like high power consumption， difficult tofabrication and miniaturization, to realize the characteristics of low cost， simplemanufacturing and capable of miniaturization, a novel actuating approach basing on themechanical effect of laser shock waves is studied in this paper.Firstly，The working principles of laser shock wave and laser driven micropump areintroduced and the flow and efficiency formula, which is applicable to "undirectionaldisplacement" valveless micropump driven by laser shock wave have been launched.Secondly，the relationships of flow characteristics (diffuser/nozzle efficiency andoutlet mass flow) and the pump geometric parameters (the expansion angle, length,minimum width and depth) are analyzed using ANSYS CFX, and the reasons for thechanges are analyzed. A finite element software, ADINA, is used to get the pumpmembrane wet modal, and the relationship between the first wet mode and the pumpchamber depth is investigated. The first wet mode is best suited for valveless micropumpworking.Thirdly, a planar valveless micropump suited for laser driven is designed. Basing onthe design thoughts to integrate pump membrane and pump body, silicon pump body isfabricated through micromachining techniques; then Si-Si and Si-glass valveless pumpshave been fabricated combined with direct bonding and anodic bonding respectively. Toachieve mass manufacturing with low cost, PDMS （polydimethylsiloxane）valvelesspump (PDMS-Si or PDMS-glass structure) is fabricated combined with soft lithographyprocess. Finally, the Experiments on the valveless micropump have been carried out, andthe experimental results are analyzed.