The Research On Microstructure Driven By Laser Shock Wave

As the MEMS becomes smaller, more inexpensive, more efficient, it is urgent toimprove its driven system. However, the driven mode based on laser shock wavemechanics effect, with the merits of noiseless, high load capacity, safety and highefficiency, is very much in line with the development of the MEMS and worthy of furtherstudy.Firstly，in this thesis, the laser shock wave driven experiment and simulation areperformed in direct ablation mode with the laser whose wavelength is1064nm and248nm.The experiment model is a cantilever beam, which is pasted with four different sacrificiallayer material of Al, Si, stainless steel and Cu. The focus of the study is the relationshipbetween driving effect and laser power density, laser frequency, the property of thesacrificial layer material. Meanwhile, it also discusses the driving effect of two differentlaser both in experiment and theory.Secondly, this thesis discusses interaction mechanism of the laser and the target inwater confined regime, analyses the improvement of the driving effect relative to thedirect ablation mode, compares the result between the experiment and the simulation indetail, explores the error sources of them carefully.Finally, a tiny silicon cantilever beam and a rectangle silicon membrane are used tosimulate the driven experiment of MEMS, their dynamic response and the vibrationvelocity wave are also studied thoroughly.