Research On Micro-aperture Rapid Measuring System Based On Luminous Flux

Photoelectric detection technology is one of the important means for the micro-aperture(diameter less than500μm) precision measurements. Now, the image processing techniques iscommonly used to detect the micro-apertures, but the relatively low detection efficiency can not meetthe increasing demand of industrialization. In order to solve this problem, a new measuring theory andtechnology for measurement of micro-aperture based on the luminous flux was presented.This paper first analyzed the detection principle of the measurement system based on luminousflux and designed the overall scheme of the system. On the basis of measurement needs, athree-dimension detection platform was designed, and the characteristic of hardware parts such as thelighting source, optic fiber and photo detector are selected and analyzed; and we designed amulti-channel flux sensor, specific include the portion of the mechanical structure and signalprocessing circuit; At last, a micro-aperture automated detection prototype system was developed,which including several functions such as motion control of the platform, data acquisition and signalprocessing.Using the detection prototype system, several experiments were design to prove the performanceof the present method. In the experiments five kinds of micro-aperture which diameters in the rangefrom150to500μm were selected. By comparing with the image processing techniques, themeasurement error of the micro-aperture area using luminous flux method was less than2%, and thechanged rate of the micro-aperture was less than1%between the two methods; The test results showthe rapid detection system based on the luminous flux is effective and feasibility; At last, the sourcesof the detection system error is analyzed; and the uncertainty result further improve the reliability ofthe measurement system.