Research On Ceramic Piezoresistive Pressure Sensor And Its Application

The s e nso r tec hno lo g y ha s be co me o ne o f the thre e ma ins ta y o felectron-informatio n tec hno lo gy, toge the r with co mp uter tec hno lo gy andcommunication technology, as a rapid progressing field. The sensor technology hasbeen attached much importance to from all over the world, for it’s the key and baseof signal detection and information acquisition. The research on new types ofsens itive materia l a nd sensor has become the hotpot and the fro nt-edge.Ceramic thick film pressure sensor is a new type of strain gauge pressure sensor,which makes use of the thick film resistance and pressure sensitive effec t. The strainresistance with piezoresistive thick-film ruthenium based resistor pasters, and printedand sintered on ceramic elastic element through thick film technology, realize thepressure detection..This article studies the basic characteristics of sensor, thick film technology,systematic theories of thick film pressure sensor and the application of pressuremeasure. It states the basic theory of ceramic hybrid pressure sensor and proposeflow, analyzes the technical difficulties of existing products, and propose the designplan of integrated ceramic thick film pressure sensor. This article mainly summarizedas follows:1. This paper presents the integrated ceramic elastic film and new thick filmscreen print design scheme, optimizes the key technology tache, changes thetrimming pattern of thick film resistors, and produces the sensors.2. Improved scheme solves the following technical difficulties: crack ofcircumference between the circular ceramic base and ceramic elastic filmwhich are sticked together; unbalanced Wheatstone bridge influences the zerooutput; analog circuit can’t satisfy the trend of the mini, intelligent, highprecision.