The Design Of A Large Range Of Piezoresistive Pressure Sensor

Nowadays, the computer technology has been developed continuously and theinformation proceeding technology has also been developed and perfected continuouslywith the development of computer technology. However, sensor, as an informationproviding tool, seems to relatively lag behind in development. Sensor technology is acommanding height strived for by people in terms of development of high and newtechnology in the21stcentury and plays quite an important role in the modern scientificand technological area. People have paid more and more attention to sensor technology.In recent years, certain achievements have been made in the research and developmentof sensor technology, which, however, are far from enough to meet people’s actualdemand and the development in pressure measuring area is more urgent. In the processof modern industrial automatic production, in order to make the equipment in normalstate or optimal state and reach the best product quality, various sensors must be used tomonitor and control various parameters in the process of production. Therefore, withoutan excellent sensor, the modern production will lose its foundation. After the1990s,China has put the research of sensor in an important position. Piezoresistive pressuresensor is the most common in sensors, but its instable performance and expensive priceare a problem we face. How to makes sensor not only widely used in aerospace field,but also have a broad market in civil use area? We should produce sensors with highquality and low cost.This paper deeply researches the principle of piezoresistive pressure sensor.According to the principle of piezoresistive effect, silicon micromechanical processingtechnology is adopted to make sensitive probe and conduct amplified normalizedtreatment through signal conditioning circuit to output the signal needed. As this kind ofsensor should be used in severe environmental condition, perfect design is done to thetemperature compensation circuit and the electromagnetic compatibility and reliabilityof the sensor are fully considered to make the sensor have a higher stability andwithstand the severe environmental condition. The piezoresistive pressure sensordesigned in the research has passed conforming test and assessment and its performanceis incomparable and its all-metal structure can withstand the severe environmentalcondition. It is characterized by simple structure, large measuring range, high precision,stable product performance and miniaturization. Thanks to its low price, it also has awide application prospect in civil product market.