Study On The Micro-Pressure Thick-film Sensor

It is introuced in this paper a novel thick film micro-pressure sensor based on piezoresistive effect of ruthenate thick film resistors using larger r / h ratio and super thin ceramic elastomer. This micro-pressure sensor is possessed of advantages such as high operation temperature,corrosion-resisting and low cost. It is developed in screen printing and sintering technology.In this article, we first systemically introduce the basic knowledge of thick-film technology and the design principles and methods of the micro-pressure thick-film sensor. On the basis of these, we put emphasis on the structural design of the sensor the design of the linear circuit and the temperature compensation of the sensor'szero.The fabrication technology processes of the sensor and the testing results are also listed.At last, we put forward some improvements.