Research On Si-based Light Emitting Device And Optical Interconnection System

Microelectronic technology based on silicon material is the basis of thedevelopment of the modern computer, automatic control, communications and otherfields. However, with the rapid development of the integrated circuit， theinterconnections of the internal transistors become extremely complex, resulting inmany problems, such as internal crosstalk, serious heat issues and limitation of speedand so on. Using light to transmit signals can greatly improve system response rate,interconnection density, and accuracy, while reducing electromagnetic crosstalk andenergy loss. It has a great potential to solve the "bottleneck" of the electricalinterconnection. However, silicon is an indirect band gap semiconductor material; thelight emission output power and external quantum conversion efficiency are very low.So, to achieve the integration of silicon optoelectronic, the key issue is to develop ahighly efficient silicon-based light emitting device and improve the efficiency ofelectronic-optic conversion and coupling. In this paper, intensive work has been donetoward this objective and the highlights of our work mainly are:1. The structure and luminescence mechanism of silicon-based light-emittingdevices （LED）, which made by standard CMOS process technology and work inreverse breakdown and forward mode respectively, are studied and analysis. Underthese guidance, wedge-shaped three-terminal Si-LEDs, octagon avalanche breakdownSi-LED are designed, made and tested.2. With the guidence of the silicon-based light emitting theory, Schottky barrierdiode, MOS tunnel diode and PIN diode are designed and manufactured in a standardCMOS process, and also are tested in both electrical and optical aspects.3. The optical interconnection system compatible with CMOS technology arestudied. Based on the light emitting device designed above, novel optical interconnectsystem are designed by CMOS technology, including polysilicon and the mixedoptical interconnection system.In summary, Si-based LED and its optical interconnection are expected to not onlysolve the “bottleneck” of conventional electrical connection and extend Moore’s lawinto new area, but also have great significance in all optical System Chip.