Research On MEMS Scanning Technique For High-definition Laser Vision System

Laser rader is the most important technique to solve the three-dimensional imaging,with a series of unique advantages: high angular resolution, high-range resolution, highspeed resolution, perfect anti-jamming capability and anti-target’s locationinformation,but also the velocity information can be obtained. Therefor, intelligentrobots, unmanned vehicles or inmanned aerial vehicles and other military and civilianfields have a wide use of the technology. So vigorously the United States, Japan, Europeand other developed countries have put the technology in the long-term planning ofspace technology, topographic mapping and ocean monitoring development.This paper presents a three-dimensional image of the target system useing acombination of laser rader technology and MEMS optical canner. The distanceinformation is obtained by the pulse time-of-flight ranging method and the azimuth andelevation information are obtained using MEMS galvanometer to do two-dimensionalscanning. The main work of this paper include the following aspects:Firstly, the paper presents the overall design of the MEMS3D laser vision system,and then a detailed study of the key technical problems in the program, such andetection methods, ranging time measurement method and theory, and make a detailedcomparison between MEMS optical scanner method an X-Y inspection galvanometertype galvanometer scanning method. Finally according to the research situation and thepaper to realize the main technology of the laser imaging system.Then it is followed by a detailed study of MEMS galvanometer scanning features,and discuss the relationship between the signal driving voltage and driving frequencyand MEMS optical scanner angle. According to galvanometer scanning principle ofMEMS, it presents the vibration mathematical model using MATLAB to give a detailedanalysis of MEMS vibration characteristics of the trajectory of the mirror in differentfrequency ratio and phase difference, and experiments are finished to verify thesimulation results. Finally, because MEMS galvanometer scan angle is too small, thepaper shows an effective project use of positive and negative lens groups extendedtechnology to solve the problem and designs a set of positive and negative lens usingZEMAX, with the experimental verification.Finally, the laser pulse ranging experiments are finished according to MEMSscaning laser vision system program using pulsed time-of-flight ranging method. Thenexperimental results are effective processed and analyzed.