Design Of Dual Workpieces Lithography Machine3d Simulation Platform Based On Virtual Reality

Lithography and the status of semiconductor integrated circuits have becomeincreasingly prominent, while the simulation is of great significance to developing thenew prototype lithography machines and producing integrated circuits, high-qualitysimulation technology can shorten the development cycle, reduce research costs, andimprove the performance of the lithography machine and then enhance the quality ofproduction of integrated circuits. In order to overcome the visual limitation of thetraditional semi-physical simulation platform, we developed a highly realistic doubleworkpieces lithography machine3D simulation platform of virtual reality.First of all, the solid modeling problem of dual workpieces lithography machinefor this virtual reality simulation platform was discussed, accordingly the analysis ofimage space-based, discrete vector-based and direcsolid modeling algorithms wasfocused on, then using the HybridModeling direct physical mixture modeling algorithmwhich is the combination of B-rep and CSG to create the Motion reference units of themodl and double workpieces stages system. On this basis, On this basis, through theexperimental,we researched simplified modeling approachs for system parts, aftercomparing analysis of its effect to establish system parts, we used Bool algorithm toachieve of solid modeling, discusses and finshed the assembly of system components inthe Pro/ENGINEERING Wildlife system.Secondly,there is a detailed analysis of relationship between the state of macro mincro motion and its various implementing agencies, in the simulation process of thehighly realistic double workpieces lithography machine three-dimensional simulationplatform of virtual reality， using the Spatial structure of the modl and doubleworkpieces stages system. We considered the design of the lithography machine virtualreality3D simulation platform scene, achieved the creation of three-dimensional sceneand Logical assembly of parts and positioning components entities In the theOpenInventor system; Completed the design of interactive motion control interface, thefunction module of Reading and storaging local data file for this simulation platformusing the analysis of lithography system motion relationship which have been donebefore, a development program for Online real-time simulation communication modulealso was discussed in the vc system. At last, all the created three dimensional solid models, positioning reference parts,relationship between the state of macro mincro motion and its various implementingagencies as well as the online and offline design access to Simulation platform wereused to accomplish the highly realistic double workpieces lithography machinethree-dimensional simulation platform of virtual reality.then the client networkcommunication module network communication module using asynchronous socketmodel based on the message mechanism and the storage module were finished for thissimulation platform， Finally some optimization was Implemented to the doubleworkpieces lithography machine three-dimensional simulation platform.