Research Of Piezoelectric Ceramics Power And Control System

With the development of ultra-precision machining, integrated circuitmanufacturing, space technology, more and more new requirements are proposed onultra-precision positioning rechnology. It demands the system to hold not only goodpositioning accuracy, but also excellent dynamic characteristics.The piezoelectric ceramic actuator with the advantages of high displacementresolution, excellent frequency response, hign load, simple controlled, no fever andless vulnerable to external electromagnetic interference, are widely used inultra-precision positioning system. Due to converse piezoelectric effect, thepositioning accuracy of the ultra-precision system are directly connected with theperformance of the PZT drive power supply.After comparing various theories of PZT drive power supply, error magnify typewith good performance in frequency response and ripple, is selected to design a PZTdrive controller system in this paper. The main contents are as follows:(1). The digital PZT driving governor developingDesigned the digital PZT driving governor with cyclone series FPGA of AlteraCorporation as the main chip, including data acquisiton module, digital to analogconversion circuit, keyboard and display module. Design the DDS signal generator,output the sine wave, triangle wave, square wave signal with frequency, amplitudeadjustable.(2). PZT drive power supply intgratioDeveloped a precision linear DC power with125V output, to provide a stablepower supply for the system. Degined error magnify type and high-voltage op-amptype PZT dive power supply, held a detailed analysis of the influencing factors ofripple and frequency response, explored the stability of op-amp circuits. Completedthe PZT drive power supply intgration, based on lab test, the frequency response ofPZT drive power supply up to4.1KHz, the ripple less than10mV.(3). Builded the PZT micro-displacement experimental platform, and test its’performance.