Macro/Micro Manipulator System Theory Analysis And Error Estimation Of The Molecular Measuring Machine

Since the emergence of scanning tunneling microscopy (SEM) in the early1980s, a series of testing technology and equipment with the resolution up toatomic weight class have been invented. The microscopic field is constantly indepth of exploration. Especailly with continuous developments of the micro-nanotechnology, it helps to drive the progress of semiconductor industry, medicine,materials science, manufacturing and other related areas. Today people are nolonger satisfied just to view the microscopic world and are urgent to measure themicroscopic world in a wide range in order to guide the further development ofrelated fields. Based on the background of these applications, the MolecularMeasuring Machine (M3) is proposed with measurement range within50mm×50mm×100um and arbitrary point-to-point measurement within the measurementuncertainty is1nm. The measurement resolution of M3is0.1nm.Based on the background of the M3, the combination of displacementworktable of the macro and micro structure is designed in this paper with theresearch of the macro and micro-combined principle in the M3core institution. Themicro worktable of X and Y dimentions was optimized on the basis of the accuracyrequirements, and this paper analyzes and verifies the optimized results with finiteelement software. Then the measurement and error models of the six-axis laserinterferometer system were established and guided the analysis of the error sourcesof the macro and micro-combined institution. Combination of macro and microstructure design to explore the principle of the various error sources, the formulasof the uncertainty components are derived. Combined with the existing errorseparation equipment, the macro and micro-combined institutions are distributedaccurately and the accuracy indicators of the measuring machine are raised. Finallybased on the ANSYS and MATLAB software, the processing error for the key partsof micropositioner in the macro and micro combination institutions is simulated,and the changes of displacement characteristics and mechanical properties ofmicropositioner under the influence of processing error are researched in order todetermine the reasonable processing accuracy of micropositioner and to guide thelaser interferometer detection scheme to improve the detection and correctionefficiency.