The Application Of Microwave RFID In FFU Monitor System

FFU (Fan Filter u nit) is the important clean room equipment,there has been many major issues in the monitoring systemincluding (1) the line is complex and number I large (2)construction is not easy (3) construction time-consuming (4)the set up cost too much and so on. Therefore, has to replacethe traditional approach with RFID systems used inmicrowave-style electronics factory FFU clean room monitoringsystem in order to explore this topic.There are a variety of wireless applications adressed inthe literature, and the microwave-type RFID system(Microwave,2.4GHz) has such advantages(1) can read multiplegoals (2) with a long communication distance (3) low cost. Andthe I/O interfaces is given too, so sensing functions in theapplication of monitoring is able to obtain significant results.In this reserch we developped a RFID sensing systerm usinga Reader to communicate with many tags, so the traditionalrestrictions in instrument control circuit is solved. Becauseof cost considerations, the topics chosen the RFID technologyto verify. The method used to introduce RFID development ofprototype design, development, testing and other procedures,and the test results verified that the introduction of FFU RFIDmonitoring system is feasible.Furthermore, the implementation of RFID in actualproduction environment of testing foundry was evaluated andverified through the integration of “RFID technology” and“information system” to reduce cycle time, to increaseproductivity, to accurately control the logistic, to improveproduction flow, to enhance process automation and monitor, andto provide complete information management of FFU. Through thisreal-time FFU monitoring system, the top managers will be able to respond to the fast changing of the FFU and to make real-timemonitor and decision so that the information flowing in thesemiconductor infrastructure through IC fabrication, therewill be real-time and transparent to improve the unstablesupply in the supplier chain, to accommodate urgent orders, andto avoid false information and misunderstanding to effectivelyshorten the cycle time and to reduce the cost to enhance thecompetition in the backend semiconductor industries.