Assessment And Analysis Of Large-angle Mirror

MOEMS (Micro-Opto-Electro-Mechanical-Systems) are providing to be an attractive solutions to a range of optical problems which requiring high functionality, high performance and low cost.Hochschule Furtwangen University has developed a micromirror for light deflection purposes based on SOI (Silicon-On-Insulator) technology. A torsion angle for this micromirror of1.9mrad is achieved at a driving voltage of U=200V.This master thesis presents the micromirror for an large torsion angle which is should be20°. The basic actuation mechanisms of the micromirror are Electrostatic, Electrothermal, Magnetic, Piezoelectric and Magnetostrictive. In the thesis these actuation mechanisms are compared in different aspects. The Electrostatic and Magnetic actuation mechanisms are chosen. For the two actuation mechanisms the calculation and simulation of different mechanical structures are finished. The magnetic and comb drive actuation mechanisms are satisfied to the demand of the thesis. Some rough fabrication process of the two kind micromirror are introduced.