| Nowadays, near-infrared(NIR) Micro-spectrometers have been widely used to investigate the quality of foods, air pollution and medical applications. Conventional NIR spectrometers have a series of disadvantages, such as large power consumption, high cost, poor portability, which can hardly satisfy the increasing requirements of harsh situations. With the rapid development of Micro-Opto-Electro-Mechanical-Systems(MOEMS), NIR spectrometers are moving towards low cost, high performance and miniaturization This paper aims at the key component of NIR Micro- spectrometers,carrying out the design and research of the MOEMS scanning grating mirror which integrated the function of diffraction, scanning and angle sensor.Based on the research status of MOEMS scanning grating mirror, aiming at the key technical problems of low diffraction efficiency, precisely controlling and accurately collecting spectrum, a novel structure of MOEMS scanning grating mirror which integrated the blazed grating, scanning mirror and angle sensor was proposed. This novel high-performance MOEMS scanning grating mirror can be readily integrated with NIR Micro-spectrometers, which will make great progress in the development of weak light detection spectrometers. In the first place, we analyzed the principles of scanning grating mirror and angle sensor, and studied on the dynamic mechanical of the system, theoretical model of high diffraction efficiency blazed grating, electromagnetically actuator and angle sensor. In the second place, we used the PCGrate software to optimize the main performance parameters of the blazed grating. And theoretical analysis, simulation and optimization of the scanning mirror and angle sensor were conducted by ANSYS finite element software. In the third place, we designed the processing process and mask layouts of the MOEMS scanning grating mirror. At last, the principle samples of scanning grating mirror were manufactured. The main research work of this paper is as follow:1. Consulted the research status of MOEMS scanning grating mirror, and analyzed the shortcoming and key technical problems of scanning grating mirror, then determined the objectives and main research work of this paper.2. Proposed a novel structure of the MOEMS scanning grating mirror which integrated the blazed grating, scanning mirror and angle sensor. Studied on the principle, theoretical model of electromagnetically scanning grating mirror and optical properties of blazed grating.3. According to the main technical index of the MOEMS scanning grating mirror, optimized the dynamic diffraction efficiency of the integrated blazed grating and analyzed the influence of platform width attributed to the fabrication error. Then carried out the optimization and performance analysis of the scanning mirror and the angle sensor. Also, analyzed the magnetic distribution of the permanent magnets. Finally, determined the optimized structural parameters of scanning mirror.4. Researched the key microfabrication techniques of the MOEMS scanning grating mirror, and designed the fabrication process and the lithography mask layouts. Then, fabricated the principle prototype of the MOEMS scanning grating mirror, and tested the structural parameters of MOEMS scanning grating mirror. Finally, completed the package of the device. |
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