Control And Signal Acquisition System Of The Micro NIR Spectrometer Based On MOEMS Scanning Grating

Micro NIR (near infrared) spectrometer is a precise apparatus in detecting theingredients of composition and their corresponding quantity, which has received wideapplication in biomedical field, food safety monitor, agriculture production, aerospaceengineering and national security. In order to improve the stability and accuracy ofmicro NIR spectrometer based on MOEMS (Micro-Opto-Electro-Mechanical Systems)scanning mirror, it is essential to realize precise control and signal acquisition. The workof this paper focuses on the precision of close-loop control of the scanning gratingmirror and signal acquisition.Based on the analysis of the research situation and the prototype of the micro NIRspectrometer at Micro/Nano Research Center in Chongqing University, a method ofusing angle sensor was proposed for closed-loop control and signal acquisition. Thecircuit for control and signal acquisition were designed and then simulated. After Testand adjustment of the circuit software, the results showed the system met therequirement of the design.The major work of paper is listed as follows:①In this paper,consult the research status of control technology for micro scanningmirror and signal acquisition system for micro NIR spectrometer,and analyze principleand structure of micro NIR spectrometer based on MOEMS scanning grating.Thedetailed design of the system of the control and signal acquisition system is proposed.②Aiming at control principle and structure,a scheme of control of MOEMSscanning grating based on angle sensor is put forward.Design and simulation of thecircuit for control.③Design of the circuit for signal acquisition including photovoltaic conversionmodule, AD conversion module, FPGA (Field Programmable Gate Array) controlmodule and USB control chip module. Coding for the FPGA module and USBfirmware.④Test and adjustment of the circuit and software including control and signalacquisition. The results showed the system met the requirement of the design.