| Titania is a kind of inorganic functional material of great significance, which has a relatively high refractive index and abrasive resistance. Also, it has some properties on light-waves, such as absorbance, reflection, diffraction and dispersion. Moreover, its has a rather low price and is innocuous. Therefore, titania has lots of applications in the fields of optic film design and preparation. As the energy band of titania is relatively wide and stable, people love to put this kind of material of high refractive index in the application of visible and near-infrared region.The present thesis made some characterizations and analysis on the structure and optic properties of titania films prepared, using titanium of high purity as the target material, common glass as the substrate and Ar/O2as the gas, with the way of radio magnetron sputtering. X-ray diffraction (XRD), ultraviolet-visible photometer (UV-is) and photoluminescence spectroscopy (PL) were employed as the characterization method. It was concluded that all the preparation condition changes could lead to the changes of the structure and optic properties of film crystals. The titania films prepared were all in anatase phase, tending to orient in101and200peak area, in which the crystallization of titania films increases firstly and then decreases with the increase of pressure, Ar flow, frequency and negative plate. UV-absorbance shifts from blue to red, also the energy band widens. The increase of sputtering time results in the widening of titania energy band. Comparisons were made between films prepared using PL characterization, in the aspects of different conditions, such as different gas components and frequencies, and the relative influences on the wavelength and intensity of excited light. |
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