Study And Fabrication Of Anti-Salt Spray Broadband Antireflective Film

In order to meet the requirements of optical instrument working in the rain, the ocean and other environment, a420-820nm broadband antireflection coating with anti-salt spray properties is developed. Fabrication of broadband antirefiection coating using film material Ta2O5, SiO2and Al2O3, which are chosen according the anti-salt spray broadband antireflection film technical requirements. The Coating system is designed depending on coating design software and basing on double efficiency interface theory. By analyzing the reason of cause error through experiments and optimizing technical parameters repeatedly, the result is simulated and optimized by variable metric with the help of coating design software. By changing the master tooling of each layer in the process of fabricate, the effect of thickness error on the spectral properties is solved. Ultimately the broadband transmittance film with anti-salt spray features is deposited by domestic vacuum coating mechanism, the average transmittance beyond98%through420～820nm wavelength.