With Flexible Electrode (micro Universal Trigger Switch Design

MEMS (Microelectromechanical System, MEMS) have many advantages, including small size, high reliability, low-cost and ease of integration. Based on these characteristics, a MEMS universal trigger switch is designed in article to provide the initiation signal for fuze. The switch having large angle reliable effect, fast response, longer closing time and better anti-overload characteristics, has important practical significance for fuze miniaturization and intelligence.The main contents:(1) This paper summarizes and analyzes the existing MEMS universal switch, and find out the good reference point for our switch; Analysis fuze environment in the process of switch used, then proposes performance indicators of the structural size, acceleration threshold, overload resistance, fast response and prolonged closure time; designs the switch main structure with snake-like spring, round mass, and flexible electrode. Switch plane size is less than3mm×3mm.(2) Finite element simulation software was used to analyze the influence of the characteristic parameters on the switching performances, optimize the characteristic parameters, and validate the switch performance whether meet the requirements. The simulation results show that the switch has a good performance:For less than200g acceleration signal the switch is not closed, greater than450g acceleration signal the switch are closed; For the impact of450g the switching response time is less than300μs and the switch closure time is greater than33μs; The largest anti-overload is30000g.(3)In conclusion, the article describes the switch processing technology and processes. A number of physical samples were produced, and part of the samples be used to quality testing. The test results show that lower yield is caused due to the dislocation of the round mass, and possible reason is given.