Rf / Microwave Mems Contact Switch

At the present, microwave MEMS devices applied in the wireless communication is a focus of the research in the world. MEMS switch is a core device of microwave communications, that it can realize route-conversion. Compared with traditional microwave devices MEMS switch has some advantages, such as low insertion loss high isolatin, good linear characterN wide applied frequency range and low power. In this paper the switch that we researched is manufactured by surface micromachining process and is applied in 0-1 OGHz.On the basis of research, we analyzed the operating principles of MEMS contactswitch. And we apply the softwares--ANSYS and HFSS to simulate how theswitch works. The results of the simulation make us understand the devices more and make the optimization of the devices' structure feasible. The switch includes SiO2 anchor CPW of disconnected single line and air-bridge structure. We base the results to design the switch's layout and the process parameters of the switch.After lots of experiments, we improved on the device layout and fabrication process. And we put forward some new fabrication process and design the new device layout that satisfied the process condition of laboratory. MEMS switch samples are successfully made out. In the process, use negative photo resist and polyimide as sacrificial layer. The key processes for sacrifiaial layer technology are soft baking hard baking and etching. These are the focuses that we research.The test results indicate that isolation is higher 30dB at 10GHz and the insertion loss is lower than 2dB at 1 OGHz. In addition, we made the research for the product of MEMS switch and packaged the sample of the switch.In summary, based on MEMS technology, we research the MEMS switch of operations principles, simulations, design, fabrications, tests and package. We design new structure for serial switch. And emphasize on the sacrificial layer technology. The experiments results show that: the design is reasonable; the fabrication processes are feasible and the devices' characteristics are in accordance with the principle analysis. These also show the feasibility of using the MEMS technology in microwave communication field and the potential of MEMS technology.