Fabrication Technology Research Of MMI-MZI Waveguide Architecture

Mach-Zehnder Interferometer is widely used in photonic integrated devices, which canbe prepared for various optical signal processing devices based on MZI structure, such aswavelength conversion device, WDM device and optical switch device. These integrateddevices are playing an important role in optical communication network system. For Mach-Zehnder structure can be integrated with other devices, it is of great value in use ofintegrated photonic devices, and is currently an important research orientation.We focus on the study of the waveguide structure of Maher Zehnder device, especiallyfor the splitter/coupler device and the phase shifter, the main work is as follows:1. The basic principle of Maher Zehnder structure and its applications in opticalcommunication system are studied, and the basic technical scheme of the integration processproduction of Maher Zehnder structure is introduced.2. The waveguide structure of integrated photonic devices in the general situation isanalyzed, and MMI structure splitter/coupler device and phase shifter are designed. Thetransmission mode and and the mode field distribution in the waveguide are studied. Wesimulated the influence of device manufacturing errors on the transmission of power underdifferent conditions, which has a guidance function for actual device fabrication.3. Using the manufacturing platform, we prepared MMI/Y branch structure in differentsize and the corresponding MZI structure waveguide devices. We studied the influence ofdifferent parameters in lithography process on the width of the pattern, and the effect of wetetching and dry etching technology to the waveguide structure of device finally.4. We tested the waveguide structure chip using optical platform. The optical field iscoupled to the waveguide by lensed fiber, and the optical field output characteristics ismeasured. Eventually we made a MMI beam splitter structure which has an insertion loss of26dB, the output optical power difference of the beam splitter output terminal is1dB, andthe light splitting ratio is45:55.