Research On Infrared Emission Characteristics Of Sillion Microchannel Array

At present, there are several micro sized thermal emitters commercially available, because of their little emissivity, compared with an ideal black body radiator the emitted radiation is moderate. By increasing the surface roughness a higher emissivity will get, this is a way to develop a new type of micro infrared radiation source.This paper designs a new type of silicon micro channel infrared light emission array structure window, the main difference compared with common thermal micro emitters is the use of2D structured bulk silicon, the special structure of MEMS infrared window increase the emissivity. The structure is obtained on the n (100) silicon substrate, through the photoelectric chemical corrosion method to etch four different macro porous silicon arrays. Using double beam infrared spectrophotometer to measure reflective spectra of the IR window, the study founds that in mid-infrared band the reflection abates. The radiation characteristic of IR window is analyzed, and the results show that in the infrared wave band the structure has good absorbency, and shows a black-body-like emission profile.