Based On The Research Of Mems Technology Terahertz Filter

Terahertz space communication combines the advantages of microwave communication and optical communication. It has the characteristic of small-volume, high-security, accurate positioning, high-speed and high-capacity. It has a broad application prospect, so the research on Terahertz communication is of significant importance.Terahertz devices is very important in the development and use of terahertz communication, and terahertz filter is important in the passive components of the communication system, its quality directly affects the overall target of the communication system, and its development can not be ignored.This paper focus on Terahertz filter technology and MEMS(Micro Electro Mechanical Systems) technology, and develop140GHz band-pass filter. The main contents of this paper are organized as follow:1. An introduction to basic theory and principles of design. Three design proposals of140GHz terahertz filter are introduced and discussed, and then decide the filter’s structure and technology roadmap. After that, the methods and processes of rectangular waveguide filter design are discussed.2. Production of the filter’s process, and analysis the process.3. The first filter is produced and tested. The manufactory craft has been improved and applied to the second filter. Through a series of testing, the second filter meets the required standard.The tested filter specifications are:Center Frequency:138GHz; Passband bandwidth:10GHz; square ratio:40dB/3dB≤2; Insertion Loss:≤1.5dB;ripple wave:≤0.5dB;Return Loss:≥18dB.Finally, the experimental results are analyzed and further improvements are proposed.