Fabrication And Research Of A3D Silicon Hall Sensors

In this paper, Hall sensors which are used to measure the geomagnetic field were fabricated. The sensitivity, noise and power consumption of the Hall sensors were measured. This paper studied the optimization of the performance, and also researched the realization of3D geomagnetic measurement.Firstly, this paper researched the dependences of sensitivity, low frequency noise and power consumption on the sizes and doping levels of the sensors theoretically. And in this paper, by the help of ANSYS we proposed a method to extract the mobility of the Hall cross with the assistance of the ANSYS, simulated the amplification factors of the magnetic flux concentrators with different sizes and materials, and simulated the ratio of the low frequency noise of the sense and force terminal of the Hall cross. During the fabrication, the doping profiles were simulated by Suprem.3. Then silicon Hall sensors with7different sizes and2doping levels are fabricated.After the fabrication, the sensitivity, noise and power consumption were measured and then compared to theoretical value. This paper proposed the methods to optimize the single Hall sensor:increasing the doping of the sensor befittingly can decrease the low frequence noise and improve signal-to-noise ratio(SNR); L/Wis choosed at about3, obtained higher SNR and sensitivity without sacrificing the size and power consumption.Last, the3D outputs were measured after integrating the magnetic flux concentrator and Hall sensor.