| Because relatively good3D micro nanostructure is a prerequisite for a lot offrontier science to produce a significant breakthrough, therefore, looking for afabrication method of micro nano-structure has become a hot research spot. Because thefemtosecond laser has low average energy and the single laser pulse energy is higher,two-photon absorption polymerization happened in the laser focus spots area when thelaser through to the high numerical aperture lenses. It means the materials in the laserspots area were induced photo-physical or photo-chemical changes.This paper is focused on three dimensional (3D) micro nanofabrication opticalsystem based on two photon polymerization by femtosecond laser, which is aintegrating computer aided design/computer aided manufacturing (CAD/CAM)technology platform. It is a kind of rapid prototyping technology. We employed faststeering mirror technology and nanopositioning technology to make the laser spotsrealizing the3D scanning in materials. Among them, the rotation of fast steering mirrorcontrolled the laser focal spots in X-Y plane. The variations of XY axis coordinate datawere transmitted to I/O interface which was connected the D/A converter. Controlvoltages as command inputs provided by the D/A converter were used to direct themirror to specify angular positions. The nanopositioning stage control the laser focalspots in Z-axis. Variations of Z axis coordinate data were transmitted to I/O interfacewhich was connected the controller/driver. The output of the controller/driver as controlvoltage directed the position of the nanopositioning stage. The two componentscooperated closely and can control the laser focal spots scanning in materials quicklyand accurately.In this paper, the other major work is to design the data model of femtosecond laserprocessing system. It mainly includes three aspects:1. Conversion of grayscale imageinto data model that processed by the laser fabrication system.2. We imposed STL filescomposed of the triangle facets which described CAD model, and then use the methodof gradual reducing dimensions to convert into coordinate data.3. Use the MATLABsoftware designed some3D structure that has special requirements. The last of this paper is the application of femtosecond laser3D micronanofabrication system. We designed and fabricated the graphite atomic lattice photoniccrystal structure in middle infrared bands. By plating chemical nickel in its surface, wefabricated metal shell photonic crystal structure. Its photonic band (PBG) was measuredby Fourier Transform Infrared Spectrometer, and photonic crystal can realize themodulation of thermal radiation. We also used a kind of intelligence materials based onsolvent response to fabricate the double layer manipulator by the laser fabricationsystem. It realized the open or close of the manipulator in different solvent environment.At the same time, we combined the3D precision mobile platform and microscopetechniques to realize the capture and release of the micro ball by manipulator via changethe solvent environment. |
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